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Key Features

  • Vertical chamber with top-loading and bottom-draining
  • Thermo-electric heating
  • Fine control needle valve pressure release
  • Temperature monitoring with safety cut-out for over pressure
  • Easy to remove wafers from the chamber

Details

The K850WM is a compact, bench-top instrument designed to critical point dry a complete 6”/152 mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.

  • Critical point drying of large samples such as wafers/MEMs (up to 8”)

Instrument Dimensions

  • 445 mm W x 290 mm H x 405 mm D

Weight

  • (64 kg packed weight)

Packed dimensions

  • 660 mm W x 640 mm H x 720 mm

Safety

  • Built-in safety devices in both hardware and software, including relief valves, level sensors, pressure switches and programming restraints

Chamber Size

  • 170 mm Ø x 15 mm H

Required Accessories

  • E4860 Recirculating heater/chiller for cooling chamber (please specify voltage)
  • EK3102 Carbon dioxide bottle heating system. Allows faster filling of liquids CO₂ especially if the cylinder is stored in a cool environment

Critical point dryer liquid carbon dioxide (CO₂) requirements

  • All models require a cylinder of liquid CO₂ fitted with a siphon tube (normally indicated by a vertical white stripe on the cylinder). If there is any doubt regarding the presence of a siphon tube, advice should be sought from the supplier

Sample Holders

  • Standard specimen holder

More information

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