E3100
Manual critical point dryer suitable for controlled drying of MEMs, hydrogels, and aerogels.
Key Features
- Vertical chamber with top-loading and bottom-draining
- Thermo-electric heating
- Fine control needle valve pressure release
- Temperature monitoring with safety cut-out for over pressure
- Easy to remove wafers from the chamber
Details
The K850WM is a compact, bench-top instrument designed to critical point dry a complete 6”/152 mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.
Applications
- Critical point drying of large samples such as wafers/MEMs (up to 8”)
Specifications
Instrument Dimensions
- 445 mm W x 290 mm H x 405 mm D
Weight
- (64 kg packed weight)
Packed dimensions
- 660 mm W x 640 mm H x 720 mm
Safety
- Built-in safety devices in both hardware and software, including relief valves, level sensors, pressure switches and programming restraints
Chamber Size
- 170 mm Ø x 15 mm H
Required Accessories
- E4860 Recirculating heater/chiller for cooling chamber (please specify voltage)
- EK3102 Carbon dioxide bottle heating system. Allows faster filling of liquids CO₂ especially if the cylinder is stored in a cool environment
Critical point dryer liquid carbon dioxide (CO₂) requirements
- All models require a cylinder of liquid CO₂ fitted with a siphon tube (normally indicated by a vertical white stripe on the cylinder). If there is any doubt regarding the presence of a siphon tube, advice should be sought from the supplier
Sample Holders
- Standard specimen holder
Downloads and Specifications
More information
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