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Key Features

  • Capable of achieving vacuum of 5x10⁻² mbar
  • Gold target as standard
  • Capable of sputtering Au, Au/Pd, and Ag
  • Pre-set profiles with single-touch operation
  • Sputter head is hinged for easy operation
  • Detachable chamber with implosion guard and top-plate allowing for easy cleaning
  • Automatic operation with minimal user intervention required
  • Compact sized; ideal for use with benchtop SEMs
  • Possibility of coating samples to 50 mm diameter

Details

The MiniQ S is ideally suited to the budget-conscious user who also demands reproducible results in an easy-to-use instrument. Suitable for most makes and models of Benchtop-SEMs and W-SEMs.

  • Table-top SEM coater
  • Low and medium magnifications

Instrument Dimensions

225mm W x 420mm D325 x 325mm H (480mm H with the coating head open)

Weight

8.7kg

Sputter Target

  • Disc-style 57 mm Ø 0.1mm thick gold (Au) target is included in the accessory pack
  • Gold/palladium (Au/Pd) and silver (Ag) target options available

Specimen Stage

50 mm Ø stage

Pump

You can purchase the instrument with a pump, or without. Please note, the MiniQS specifications are based on use with a Pfeiffer Duo 6 pump.

More information

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