Key Features
- Pump-down Vacuum: 5x10⁻² mbar
- Gold target as standard
- Capable of sputtering Au, Au/Pd, and Ag
- Pre-set profiles with single-touch operation
- Sputter head is hinged for easy operation
- Detachable chamber with implosion guard and top-plate allowing for easy cleaning
- Automatic operation with minimal user intervention required
- Compact sized; ideal for use with benchtop SEMs
- Possibility of coating samples to 50 mm diameter
Details
The MiniQ S is ideally suited to the budget-conscious user who also demands reproducible results in an easy-to-use instrument. Suitable for most makes and models of Benchtop-SEMs and W-SEMs.
Applications
- Table-top SEM coater
- Low and medium magnifications
Specifications
Instrument Dimensions
225mm W x 420mm D325 x 325mm H (480mm H with the coating head open)
Weight
8.7kg
Sputter Target
- Disc-style 57 mm Ø 0.1mm thick gold (Au) target is included in the accessory pack
- Gold/palladium (Au/Pd) and silver (Ag) target options available
Specimen Stage
50 mm Ø stage
Pump
You can purchase the instrument with a pump, or without. Please note, the MiniQS specifications are based on use with a Pfeiffer Duo 6 pump.
Downloads and Specifications
More information
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