Q300T ES Plus
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Single sputter head allows coating of samples up to 150 mm Ø
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
- 1 x Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
Details
The Q300T ES Plus is a turbomolecular-pumped combined sputter and carbon coater suitable for coating samples up to 150 mm Ø.
- High resolution SEM E Large samples e.g Silicon Wafers (up to 150 mm)
- Protective platinum layers for FIB
- Carbon coating for elemental analysis and TEM
Product Information
- Single sputter head
- Large Chamber (300 mm Ø) E Pump-down Vacuum: 5x10 mbar
- Chromium and Carbon rod as standard
Instrument case
590 mm W x 535 mm D x 420 mm H (maximum height during the opening of the coating head: 772 mm)
Weight
36 kg (packed: 59 kg)
Packed dimensions
730 mm W x 630 mm D x 690 mm H
Work chamber
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target
Disc-style 57 mm Ø. A 0.5 mm thick chromium (Cr) is fitted as standard.
Specimen stage
A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm
More information
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