RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
- Modular system for mounting in glove boxes
- Integral glove box pressure monitoring
- Remote operation from touchscreen control panel
Details
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation. Modular design enables vacuum chamber to be mounted into a glovebox.
Applications
- High resolution SEM and FIB-SEM
- Carbon coating for elemental analysis and carbon coating of TEM grids
Specifications
Instrument case
267 mm W x 490 mm D x 494 mm H
(total height with coating head open: 650 mm)
Weight
40 kg (packed: 44 kg)
Packed dimensions
725 mm W x 660 mm D x 787 mm H
Work chamber
Borosilicate glass 152 mm ID x 214 mm H
Display
145 mm W x 145 mm H, 320 x 240 colour graphic TFT display
User interface
Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due.
Sputter target
Disc-style 57 mm Ø 0.5 mm thick chromium (Cr) target is fitted as standard. T S and T ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.
Carbon evaporation source
Carbon rods 3.05mm X 300mm x 10 qty are supplied with carbon rod head as standard. Carbon fibre head option available. T E and T ES versions only.
Specimen stage
50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.
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