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Key Features

  • Capable of achieving vacuum of 5x10⁻² mbar
  • Gold target as standard
  • Capable of sputtering non-oxidizing metals e.g. Au, Pt , Pd, Au/Pd
  • Touch and swipe capacitive screen
  • USB port for upgrades and download of log files
  • Multiple-user profiles can be set up on one instrument
  • 16GB of memory can store more than 1000 recipes
  • New multi-colour LED visual status indicator
  • Interchangeable stage options and plug-in heads

Details

Rotary pumped coater suitable for use with Tungsten/LaB⁶ SEM and Benchtop SEM - an automatic sputter coater for non-oxidising metals. Available sputtering targets including gold, gold/palladium and platinum.

  • Tungsten/LaB6 SEM and Benchtop SEM
  • Low and medium magnifications

Instrument case

585 mm W x 535 mm D x 410 mm H

(total height with coating head open: 650 mm)

Weight

28 kg (packed: 42 kg)

Packed dimensions

725 mm W x 660 mm D x 680 mm H

Work chamber

Borosilicate glass 150 mm ID x 127 mm H

Display

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface

Full graphical interface with touch screen buttons includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

Sputter target

Disc-style 57 mm Ø. 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only. Pt, Pt/Pd, Au, Au/Pd, Ag, Pd and Cu target options available in various thicknesses.

Specimen stage

50 mm Ø rotation stage with rotation speed of 8-20 rpm.

Other stages available on request.

More information

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