Q150TS Plus
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
Details
The Q150T S Plus is a turbomolecular pumped sputter coater system. The turbomolecular pump enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging.
- High resolution SEM and FIB-SEM
- Protective platinum layers for FIB
- Medium to high magnifications
Instrument case
585 mm W x 535 mm D x 410 mm H
(total height with coating head open: 650 mm)
Weight
28 kg (packed: 42 kg)
Packed dimensions
725 mm W x 660 mm D x 680 mm H
Work chamber
Borosilicate glass 150 mm ID x 127 mm H
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter target
Disc-style 57 mm Ø 0.5 mm thick chromium (Cr) target is fitted as standard. T S and T ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.
Specimen stage
50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.
Gallery
More information
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