Q150V ES Plus
Key Features
- Ultimate vacuum of 1x10⁻⁶ mbar
- Cr target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
- Multi-colour LED visual status indicator
- 16GB of memory can store more than 1000 recipes
- Multiple-user profiles can be set up on one instrument
- Touch and swipe capacitive screen
- Standard and extended height glass chamber included as standard
Details
The Q150V ES Plus is a turbomolecular pumped combined sputter coater and carbon evaporation system, optimised for high vacuum applications. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. This also allows for ultra-fine coatings of carbon for use in TEM imaging. The deposition head inserts can be swapped in seconds. Metal evaporation/aperture cleaning option available.
- Ultra-high-resolution magnification SEM and FIB-SEM
- Carbon coating for elemental analysis and carbon coating of TEM grids
Instrument case
585 mm W x 521 mm D x 410 mm H
(total height with coating head open: 650 mm)
Weight
32.4 kg (packed: 42 kg)
Packed dimensions
725 mm W x 660 mm D x 680 mm H
Work chamber
Borosilicate glass 150 mm ID x 133 mm H
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter target
Disc-style 57 mm Ø 0.5 mm thick chromium (Cr) target is fitted as standard. T S and T ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.
Carbon evaporation source
Carbon rods 3.05mm X 300mm x 10 qty are supplied with carbon rod head as standard. Carbon fibre head option available. T E and T ES versions only
Specimen stage
50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.
Gallery
More information
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