Q150V S Plus
Key Features
- Capable of achieving vacuum of 1 x 10⁻⁶ mbar
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt.
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
Details
The Q150V S Plus is a turbomolecular-pumped sputter coater, optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10⁻⁶ mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. Available sputtering targets include chromium, iridium and all noble metals.
- Ultra-high-resolution magnification SEM and FIB-SEM
Product Information
Pump-down Vacuum: 1x10⁻⁶ mbar
Chromium target as standard
Capable of sputtering oxidizing and non-oxidizing metals e.g Cr, Ir, W, Al, Ti
Instrument case
585 mm W x 521 mm D x 410 mm H
(total height with coating head open: 650 mm)
Weight
32.4 kg (packed: 42 kg)
Packed dimensions
725 mm W x 660 mm D x 680 mm H
Work chamber
Borosilicate glass 150 mm ID x 133 mm H
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter target
Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. V S and V ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.
Specimen stage
50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.
Gallery
More information
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