skip to main content

Key Features

  • Capable of achieving vacuum of 1 x 10⁻⁶ mbar
  • Chromium target as standard
  • Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt.
  • Touch and swipe capacitive screen
  • USB port for upgrades and download of process log files
  • Multiple-user profiles can be set up on one instrument
  • 16GB of memory can store more than 1000 recipes
  • Multi-colour LED visual status indicator

Details

The Q150V S Plus is a turbomolecular-pumped sputter coater, optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10⁻⁶ mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. Available sputtering targets include chromium, iridium and all noble metals.

  • Ultra-high-resolution magnification SEM and FIB-SEM

Product Information

Pump-down Vacuum: 1x10⁻⁶ mbar

Chromium target as standard

Capable of sputtering oxidizing and non-oxidizing metals e.g Cr, Ir, W, Al, Ti

Instrument case

585 mm W x 521 mm D x 410 mm H

(total height with coating head open: 650 mm)

Weight

32.4 kg (packed: 42 kg)

Packed dimensions

725 mm W x 660 mm D x 680 mm H

Work chamber

Borosilicate glass 150 mm ID x 133 mm H

Display

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface

Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

Sputter target

Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. V S and V ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.

Specimen stage

50 mm Ø rotation stage with rotation speed of 8-20 rpm. 

Other stages available on request.

Gallery

Gallery Thumbnail
Gallery Thumbnail
Selected Image

More information

Fill in your details and a member of the team will get back to you shortly.